Cathodic Arc Thin Film Equipment

Physical vapor deposition (PVD) system utilizing localized low-voltage, high-current electrical arcs to vaporize solid cathode targets into fully ionized plasma. The high ionization rate (40%-80%) drives dense atomic-level bonding and high compressive stress, enabling high-rate deposition of wear-resistant and decorative coatings on high-speed steel (HSS), carbide cutting tools, automotive components, and medical devices.

High Ionization Efficiency: Plasma ionization rate reaches 40%-80%, ensuring superior film-to-substrate adhesion.

Modular Cathodes: Quick-change target assembly minimizes maintenance downtime; compatible with planar and rotatable cylindrical cathodes.

Closed-Loop Gas Control: MKS mass flow controllers maintain precise reactive gas partial pressures for compound films (TiAlN, TiCN).

Multi-Axis Planetary Rotation: Customized rotation and revolution drives ensure thickness uniformity (±5%) across complex 3D geometries.

Dual-Mode Operation: Supports DC arc evaporation and pulsed bias sputtering integration for multi-layer architectures.

Roughing Pumps: Roots and rotary vane pump combination for rapid pump-down from atmosphere to 10 Pa.

High Vacuum Pump: Magnetically levitated turbomolecular pump (1600–3200 L/s) ensuring hydrocarbon-free base pressure.

Valves & Gauging: Pneumatic high-vacuum gate valves with Pirani and cold cathode ionization interlocks to prevent oil backstreaming.

[Visual Guide for Web Producer]: Insert schematic or clear photo of the vacuum plumbing layout, highlighting turbomolecular pump and pneumatic gate valve positioning.

Standard Cathode Targets (Purity ≥ 99.95%)
Transition Metals: Ti, Cr, Zr, Al, TiAl (50/50, 33/67 atomic ratios), CrAl, W, Nb, Si.

Alloys & Compounds: Graphite (for DLC interlayers), stainless steel.

Substrate Compatibility & Pre-Treatment
Materials: WC-Co cutting tools, hobbing cutters, broaches, stamping dies, injection molds, titanium alloys (Grade 5), and stainless steel.

Pre-Treatment: Ultrasonic solvent degreasing and in-situ ion bombardment cleaning (Ar⁺ plasma etching) inside the chamber prior to deposition.

Cutting & Forming Tools: TiN, TiAlN, and AlCrN coatings raising surface hardness to 3000–3500 HV, suppressing thermal cratering and abrasive wear.

Automotive Components: Friction-reducing coatings for piston rings, fuel injection pins, and gear components.

Medical Implants: Biocompatible TiN and ZrN hard coatings on orthopedic joint replacements and surgical screws.

Decorative Hardware: Color spectrum production (gold brass, rose gold, gunmetal black, titanium grey) via reactive gas tuning.

Chamber Geometry: Vertical loading (pit-mounted or floor-standing) or horizontal front-loading configurations.

Source Configuration: Filtered cathodic arc (FAC) magnetic duct sources to eliminate macroparticles for optical or precision electronics.

Automation: Robotic loading arms, AGV docking integration, and MES data logging protocols.

Leak Detection: Helium mass spectrometer testing on all chambers and weld seams (≤ 1 × 10⁻⁹ Pa·m³/s).

Electrical Safety: High-voltage insulation resistance, grounding continuity, and PLC interlock functional verification.

Trial Run (FAT): 72-hour continuous dry-run test plus standard coating deposition test evaluated via Calo-test (thickness) and scratch tester (adhesion).

Documentation Package: Electrical schematics, P&ID diagrams, PLC source codes, material certificates, and FAT reports.

Site Preparation: Detailed layout drawings, cooling water metrics, and power distribution specifications provided 4 weeks prior to shipment.

Commissioning: On-site mechanical assembly, vacuum calibration, and recipe handover by senior process engineers.

Training: Hands-on instruction covering hardware maintenance, vacuum troubleshooting, and safety protocols.

Support: Remote diagnostic software integration for real-time PLC troubleshooting, backed by regional spare parts inventory.