Equipment Description:
· Equipment introduction:
Vacuum metalizing equipment adopts double chamber structure design, process chamber + loading/unloading chamber, which IS the perfect integration of process reliability and process efficiency. vacuum metalizing equipment is equipped with a high energy Ionbeam Cleaning Source, several sets of Magnetron Sputtering Source, and reliable servo electromagnetic propulsion system, vacuum metalizing equipment is highly modular, stable, easy to operate and easy to maintain.
· Equipment advantages:
》 Modular universal interface, directly compatible with different forms of cathode targets, allowing DC pulse, intermediate frequency, RF working mode, strong compatibility;
》 Specially designed magnetic field and process gas path, effectively improve the target utilization rate and long-term process stability;
》 Double chamber structure design, not only to ensure the stability and consistency of the process, but also greatly shorten the pre-coating treatment time, improve production efficiency;
》 The self-designed automatic intelligent process operating system provides comprehensive and convenient process formula editing and calling capabilities, equipped with real-time process parameter monitoring system, allowing online remote control.
Application Field:
》Can be plated Au, Ag, Ir, Re, Pt, Ta, Ti, Cu, Cr, Ni and other metals and their compounds;
》Can be used in electronic components, solar cells, high-end manufacturing, magneto-optical information storage and other fields.
Coating Type:
|
Coating type |
Film thickness(μm) |
Application field |
|
Au,Ag,Ir,Re,Pt,Ta,Cr,etc |
0.5-10 |
Electronic component, solar cells, high-end manufacturing, magneto-optical information storage, etc. |
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