The vacuum evaporation composite coating equipment integrates electron beam evaporation and ion-assisted deposition (IAD) technologies, supporting multi-process composite coating, and is suitable for high-precision optical film preparation. The equipment is equipped with a low-temperature trap and a dual electron gun system, with a limit vacuum of <5.0×10⁻⁶ Pa, and the uniformity of the film layer is controlled within ±1%. The vacuum evaporation composite coating equipment can simultaneously be compatible with AR film, AF film and metal decorative film, meeting the multi-functional coating requirements of complex optical devices.
Technical Advantages:
· The vacuum evaporation composite coating equipment adopts a fully automatic film thickness control system, supporting both light control and crystal control modes;
· The composite process reduces the stress of the film layer and enhances the adhesion of the hard coating (>5N);
· The modular design enables rapid source replacement, meeting the requirements of both research and mass production.
Application Fields: Laser devices, optical sensors, semiconductor packaging, etc.
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